Analog Devices, Inc.
PSEUDO-EXTENSIONAL MODE MEMS RING GYROSCOPE
Last updated:
Abstract:
An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.
Status:
Application
Type:
Utility
Filling date:
16 Dec 2019
Issue date:
6 Aug 2020