Analog Devices, Inc.
Coupled accordion springs in microelectromechanical systems (MEMS) devices

Abstract:

Microelectromechanical systems (MEMS) devices are described that include a proof mass movably connected to a substrate by accordion springs disposed on opposite sides of the proof mass, with a coupler coupling two of the accordion springs together. The coupler is a bar in some implementations, and may be rigid. The coupler therefore restricts the motion of the accordion springs relative to each other. In this manner, the motion of the proof mass may be restricted to preferred types and frequencies.