Analog Devices, Inc.
Integrated linear and angular MEMS accelerometers

Abstract:

An electromechanical system (MEMS) accelerometer is described. The MEMS accelerometer may be configured to sense linear acceleration along one, two or three axes, and to sense angular acceleration about one, two or three axes. As such, the MEMS accelerometer may serve as 2-axis, 3-axis, 4-axis, 5-axis or 6-axis inertial accelerometer. In some embodiments, the MEMS accelerometer may comprise a single mass connected to at least one anchor via a plurality of tethers. In other embodiments, the MEMS accelerometer may comprise a proof mass connected to at least one anchor via a plurality of tethers and one or more shuttle masses connected to the proof mass via a second plurality of tethers. Rotational and linear motion of the MEMS accelerometer may be sensed using capacitive sensors.