Wolfspeed, Inc.
POWER DEVICES WITH A HYBRID GATE STRUCTURE

Abstract:

A vertical field effect device having a body, gate dielectric, and a gate electrode, which is in a trench that extends into the body from the top surface of the body and is located between first and second source regions. The first and second regions vertically overlap the gate electrode. The first and second channel regions laterally overlap a bottom of the gate electrode, such that each channel formed in the first and second source regions have a horizontal segment where the first and second channel regions laterally overlap the bottom of the gate electrode. In another embodiment, the first and second channel regions also vertically overlap the gate electrode such that each channel formed in the first and second source regions also have a vertical segment where the first and second channel regions vertically overlap the gate electrode.