Maxim Integrated Products, Inc.
System for monitoring and controlling an integrated circuit testing machine

Abstract:

A system for monitoring and controlling an IC testing machine includes a vibration sensor, a sensor interface, and a processor coupled to the sensor interface. The vibration sensor is in mechanical communication with an IC testing machine to develop an electrical vibration signal representing mechanical vibrations generated by the operation of the IC testing machine. The sensor interface processes the vibration signal to develop vibration data that can be processed by the processor to determine whether the vibration data is indicative of an operational anomaly and, if so, to generate a machine control signal to correct an operation of the IC testing machine. Multiple vibration sensors can be used to increase the amount of vibration data available for analysis.