Microchip Technology Incorporated
METAL-INSULATOR-METAL (MIM) CAPACITOR

Abstract:

A process of forming a metal-insulator-metal (MIM) capacitor may be incorporated into a process of forming metal bond pads connected directly to a top metal interconnect layer (e.g., Cu MTOP). The MIM capacitor may include a dielectric layer formed between a bottom plate defined by the Cu MTOP and a top plate comprising an extension of, or connected directly to, a metal bond pad formed above the Cu MTOP. The process of forming the MIM capacitor may include etching an opening in a passivation layer formed over the Cu MTOP to expose a top surface of the Cu MTOP, forming a dielectric layer extending into the passivation layer opening and onto the exposed Cu MTOP surface, removing portions of the dielectric layer to define a capacitor dielectric, and depositing bond pad metal extending into the passivation layer opening and onto the capacitor dielectric, to define the MIM capacitor top plate.