ON Semiconductor Corporation
DIRECT COOLING POWER SEMICONDUCTOR PACKAGE

Abstract:

A direct cooling power semiconductor package includes a power package and a cooling structure. The power package includes at least a power device on a first surface of a substrate, and the cooling structure is disposed on a second surface of the substrate, wherein the second surface and the first surface are opposite to each other, and the cooling structure includes a housing covering the second surface to form a containing space, a cooling liquid fluid or gas filled in the containing space, and a plurality of semi-closed metal structures. The semi-closed metal structures are in direct contact with the second surface in the housing.