Skyworks Solutions, Inc.
ACOUSTIC WAVE DEVICE WITH SPINEL LAYER AND TEMPERATURE COMPENSATION LAYER
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Abstract:
An acoustic wave device that includes a spinel layer, a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer is disclosed. The piezoelectric layer is disposed between the interdigital transducer electrode and the spinel layer. The acoustic wave device is configured to generate an acoustic wave having a wavelength of .lamda.. The piezoelectric layer can have a thickness than is less than A. In some embodiments, the acoustic wave device can include a temperature compensating layer that is disposed between the piezoelectric layer and the spinel layer.
Status:
Application
Type:
Utility
Filling date:
29 Dec 2021
Issue date:
21 Apr 2022