Skyworks Solutions, Inc.
Acoustic wave device with transverse mode suppression
Last updated:
Abstract:
Aspects of this disclosure relate to an acoustic wave device with transverse mode suppression. The acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a multi-layer mass loading strip. The mass loading strip has a density that is higher than a density of the temperature compensation layer. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. The mass loading strip can include a first layer for adhesion and a second layer for mass loading. The mass loading strip can suppress a transverse mode.
Status:
Grant
Type:
Utility
Filling date:
20 Dec 2019
Issue date:
21 Jun 2022