Skyworks Solutions, Inc.
Alternative temperature compensating materials to amorphous silica in acoustic wave resonators

Abstract:

An acoustic wave device comprises a piezoelectric material and a second material disposed on the piezoelectric material and having a temperature coefficient of frequency of a sign opposite a sign of a temperature coefficient of frequency of the piezoelectric material, the second material including one or more of Si.sub.1-x-yTi.sub.xP.sub.yO.sub.2-zF.sub.z (x,y,z<0.1), Si.sub.1-x-yGe.sub.xP.sub.yO.sub.2-zF.sub.z, Si.sub.1-x-yB.sub.xP.sub.yO.sub.2-zF.sub.z (x=y<0.04), Si.sub.1-3xZn.sub.xP.sub.2xO.sub.2-yF.sub.y, Si.sub.1-xP.sub.xO.sub.2-yF.sub.y, Si.sub.1-2yGa.sub.xP.sub.xO.sub.4, Si.sub.1-2yGa.sub.y-xB.sub.xP.sub.yO.sub.4, Si.sub.1-2yGa.sub.y-xB.sub.xP.sub.yO.sub.4-zF.sub.z, TiNb.sub.10O.sub.29, Si.sub.1-xTi.sub.xO.sub.2-yF.sub.y, Si.sub.1-x-yTi.sub.xP.sub.yO.sub.2, Si.sub.1-xB.sub.xO.sub.2-yF.sub.y, Si.sub.1-x-yB.sub.xP.sub.yO.sub.2, GeO.sub.2, GeO.sub.2-yF.sub.y, Si.sub.1-xGe.sub.xO.sub.2, Si.sub.1-xGe.sub.xO.sub.2-yF.sub.y, Si.sub.1-x-yGe.sub.xP.sub.yO.sub.2, ZnP.sub.2O.sub.6, Si.sub.1-3xZn.sub.xP.sub.2xO.sub.2, Ge.sub.1-3xZn.sub.xP.sub.2xO.sub.2, TeO.sub.x, Si.sub.1-xTe.sub.xO.sub.2+y, Ge.sub.1-xTe.sub.xO.sub.2+y, Si.sub.1-3x-yGe.sub.yZn.sub.xP.sub.2xO.sub.2, Si.sub.1-xP.sub.xO.sub.2-xN.sub.x, Si--O--C, Si.sub.1-2yAl.sub.xP.sub.xO.sub.4, or BeF.sub.2.