Skyworks Solutions, Inc.
Elastic wave device with sub-wavelength thick piezoelectric layer and high velocity layer

Abstract:

Aspects of this disclosure relate to an elastic wave device. The elastic wave device includes a sub-wavelength thick piezoelectric layer, an interdigital transducer electrode on the piezoelectric layer, and a high velocity layer configured to inhibit an elastic wave from leaking from the piezoelectric layer at anti-resonance.