Skyworks Solutions, Inc.
ACOUSTIC WAVE RESONATOR WITH ROTATED AND TILTED INTERDIGITAL TRANSDUCER ELECTRODE

Abstract:

Acoustic wave resonators are disclosed that include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode has a rotation angle and a tilt angle. The rotation angle and the tilt angle can together increase a figure of merit of the acoustic wave device. The rotation angle and the tilt angle can both be non-zero.