Skyworks Solutions, Inc.
RAYLEIGH MODE SURFACE ACOUSTIC WAVE RESONATOR

Abstract:

Surface acoustic wave resonators are disclosed. In certain embodiments, a surface acoustic wave resonator can include a high impedance layer, a piezoelectric layer over the high impedance layer, an interdigital transducer electrode over the piezoelectric layer, and a low impedance layer between the high impedance layer and the piezoelectric layer. An acoustic impedance of the high impedance layer is greater than an acoustic impedance of the piezoelectric layer. An acoustic impedance of the low impedance layer is lower than the acoustic impedance of the high impedance layer. The piezoelectric layer can have a cut angle in a range from 115.degree. to 135.degree.. The surface acoustic wave resonator is configured to generate a Rayleigh mode surface acoustic wave having a wavelength of .lamda..