Skyworks Solutions, Inc.
ACOUSTIC WAVE DEVICE WITH SPINEL LAYER

Abstract:

An acoustic wave device that includes a polycrystalline spinel layer, a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer is disclosed. The piezoelectric layer is disposed between the interdigital transducer electrode and the polycrystalline spinel layer. The acoustic wave device is configured to generate an acoustic wave having a wavelength of .lamda.. The piezoelectric layer can have a thickness that is less than .lamda.. In some embodiments, the acoustic wave device can include a temperature compensating layer that is disposed between the piezoelectric layer and the spinel layer.