Teradyne, Inc.
Coaxial via arrangement in probe card for automated test equipment

Abstract:

A probe card in an automated test equipment (ATE) is disclosed. The probe card may be a portion of a vertical-type probe card assembly in which pads on a circuit board are contacted by probe pins, with vertical vias in the circuit board interconnecting various conductive elements. Disclosed herein is a probe card having ground vias in a coaxial arrangement around a signal via that provide electromagnetic shielding to a signal via to reduce crosstalk between adjacent signal vias.