Teradyne, Inc.
THERMAL PLATE HAVING A FLUID CHANNEL

Abstract:

An example apparatus is for contacting a device to change a temperature of the device. The apparatus includes a plate configured to contact the device and a channel within the plate configured to enable flow of fluid between an input port and an output port. The plate includes a thermally conductive material to conduct heat between the device and the fluid. The channel includes multiple islands arranged in series. An island among the multiple islands is arranged to receive the fluid at a first side. The island is for splitting the fluid into a first flow and a second flow and for causing the first flow and the second flow to merge at a second side of the island that is downstream of the first side of the island.