Universal Display Corporation
ORGANIC VAPOR JET DEPOSITION DEVICE CONFIGURATION

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Abstract:

Devices and techniques are provided for depositing material on a substrate, such as for fabrication of OLEDs and layers used in OLEDs. A depositor block includes one or more delivery apertures, one or more exhaust apertures, and one or more confinement gas channels. Each delivery aperture is arranged such that it is between an exhaust aperture and a confinement gas channel, thereby improving deposition by reducing overspray of material.

Status:
Application
Type:

Utility

Filling date:

18 Oct 2017

Issue date:

9 Sep 2021