Universal Display Corporation
NOZZLE EXIT CONTOURS FOR PATTERN COMPOSITION
Last updated:
Abstract:
A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
Status:
Application
Type:
Utility
Filling date:
26 Oct 2021
Issue date:
10 Feb 2022