Universal Display Corporation
NOZZLE EXIT CONTOURS FOR PATTERN COMPOSITION

Last updated:

Abstract:

A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

Status:
Application
Type:

Utility

Filling date:

26 Oct 2021

Issue date:

10 Feb 2022