Universal Display Corporation
Barrier film for electronic devices and substrates

Abstract:

Methods for forming a coating over a surface are disclosed. A method includes directing a first source of barrier film material toward a substrate in a first direction at an angle .theta. relative to the substrate, wherein .theta. is greater than about 0.degree. and less than about 85.degree.. Additionally, a method of depositing a barrier film over a substrate includes directing a plurality of N sources of barrier film material toward a substrate, each source being directed at an angle .theta..sub.N relative to the substrate, wherein for each .theta..sub.N, .theta. is greater than about 0.degree. and less than about 180.degree.. For at least a first of the .theta..sub.N, .theta..sub.N is greater than about 0.degree. and less than about 85.degree., and for at least a second of the .theta..sub.N, .theta..sub.N is greater than about 95.degree. and less than about 180.degree..