Universal Display Corporation
MANUFACTURING FLEXIBLE ORGANIC ELECTRONIC DEVICES
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Abstract:
A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.
Status:
Application
Type:
Utility
Filling date:
30 Oct 2020
Issue date:
11 Mar 2021