Universal Display Corporation
Apparatus and Method for Printing Multilayer Organic Thin Films from Vapor Phase in an Ultra-Pure Gas Ambient

Abstract:

Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.