Xilinx, Inc.
MITIGATION FOR FINFET TECHNOLOGY USING DEEP ISOLATION

Abstract:

FinFET, P-N junctions and methods for forming the same are described herein. In one example, a FinFET transistor is described that includes a fin having a channel region wrapped by a gate, the channel region connecting a source and a drain. A first isolation layer is disposed on a first side of the in and a second isolation layer is disposed on a second side of the fin, where the second side is opposite of the first side. The second oxide isolation layer has a thickness greater than a thickness of the first isolation layer.