Texas Instruments Incorporated
Dopant anneal with stabilization step for IC with matched devices

Abstract:

A method of fabricating an integrated circuit (IC) includes providing a substrate having a semiconductor surface layer thereon including a field dielectric in a portion of the semiconductor surface layer and a pair of matched devices in at least one of a CMOS area, BiCMOS area, bipolar transistor area, and a resistor area. Dopants are ion implanted into the at least one of the CMOS area, the BiCMOS area, the bipolar transistor area, and the resistor area. The substrate is annealed in a processing chamber of a rapid thermal processor (RTP). The annealing comprises an initial temperature stabilization step including first annealing at a lower temperature for a first time of at least 20 seconds, and then a second annealing comprising ramping from the lower temperature to a peak higher temperature that is at least 100.degree. C. higher (>) than the lower temperature.