Texas Instruments Incorporated
Universal load port for ultraviolet radiation semiconductor wafer processing machine

Abstract:

A semiconductor cassette universal load port. The universal load port comprises a frame, three pins coupled to the frame forming a first portion of a kinematic coupling system configured to locate a 12-inch semiconductor wafer cassette for access by a robot arm of an ultraviolet (UV) radiation (RAD) machine, a first bracket coupled to the frame, a second bracket coupled to the frame, and a chuck coupled to the frame, wherein the first and second bracket and the chuck are configured to locate an 8-inch semiconductor wafer cassette for access by the robot arm of the RAD UV machine.