Texas Instruments Incorporated
Microelectromechanical system resonator-based oscillator

Abstract:

A device includes a MEMS resonator and oscillator circuit coupled to the MEMS resonator. The circuit includes a first transistor having a first control terminal and first and second current terminals, and a second transistor having a second control terminal and third and fourth current terminals. The circuit includes a resonator coupling network configured to inductively couple MEMS resonator terminals to the first and third current terminals, and to couple the first and third current terminals. The circuit includes a control terminal coupling network configured to couple the first and second control terminals, and to reduce a voltage swing at the first and second control terminals relative to a voltage swing at the first and third current terminals. The circuit includes a second terminal coupling network configured to couple the second and fourth current terminals. A second terminal coupling network resonant frequency is approximately that of MEMS resonator.