Texas Instruments Incorporated
ELECTROSTATIC ACTUATOR WITH 4-BIT DIGITAL ELECTRODE

Abstract:

A system includes a hinge structure. The hinge structure includes four support posts and four hinges, each hinge coupled to an edge of a support post and to a plate of the hinge structure, where each hinge includes two 90.degree. turns. The system also includes a mirror coupled to the hinge structure and an electrode structure coupled to the hinge structure.