Texas Instruments Incorporated
FRINGING-FIELD, PARALLEL PLATE ACTUATOR

Abstract:

A phase light modulator includes a base plate, a mirror, a perforated hinge plate, and first second support posts. The perforated hinge plate supports the mirror. The perforated hinge plate has first and second flexural arms. The perforated hinge plate is configured to move toward or away from the base plate based on application of a potential difference between the base plate and the perforated hinge plate. The first flexural arm is connected to the first support posts, and the second flexural arm is connected to the second support post.