Texas Instruments Incorporated
SHIELDED SENSOR STRUCTURE AND METHOD OF MAKING SAME
Last updated:
Abstract:
In a described example, a structure includes a substrate having a surface with multiple sides. A sensor is positioned within the substrate and a seed layer is over at least four sides of the surface of the substrate. A magnetic shield layer is over the seed layer for the at least four sides of the surface of the substrate.
Status:
Application
Type:
Utility
Filling date:
26 Aug 2020
Issue date:
4 Mar 2021