Lockheed Martin Corporation
Scalable processes for forming tin nanoparticles, compositions containing tin nanoparticles, and applications utilizing same

Abstract:

A method includes providing nanoparticles having a tin coating surrounding a metal nucleus, such as copper. The nucleus forms first and acts as a seed growing into nanoparticles with a tin coating and a nucleus. The nanoparticles are at least partially vaporized, thereby producing vaporized tin ions. An emission of extreme ultraviolet (EUV) radiation is generated from the vaporized tin ions.