Agilent Technologies, Inc.
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
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Abstract:
One aspect of the invention provides a method of making a thermal vapor coated article including a chemical vapor deposition of a coating on a surface of the article. The method includes exposing the article to one or more of (i) an inorganic precursor, (ii) an organic molecular precursor, (iii) a precursor to produce oxides or nitrides, or (iv) a combination thereof, wherein the coating is one or more of resistant to adhesion of biomolecules to the coated surface or inert to analytes in contact with the coated surface.
Status:
Application
Type:
Utility
Filling date:
13 Jan 2021
Issue date:
24 Jun 2021