Agilent Technologies, Inc.
Vacuum Pumping System Comprising A Vacuum Pump And Its Motor

Abstract:

A vacuum pumping system includes a vacuum pump and a motor for driving the vacuum pump. A motor stator and a motor rotor are received in a pumping chamber of the vacuum pump. Thanks to such arrangement, the vacuum pumping can be made as a single, sealed unit and the need for dynamic seals can be avoided. Moreover, the vacuum pumping system can be more compact and lighter than prior vacuum pumping systems. A pump rotor of the vacuum pump may be at least partially made as a hollow body, and the motor may be received inside the pump rotor.