Agilent Technologies, Inc.
OPTICAL IMAGING PERFORMANCE TEST SYSTEM AND METHOD

Abstract:

For testing the imaging performance of an optical system, a test target is positioned at an object plane of the optical system, and illuminated to generate an image beam. One or more images of the test target are acquired from the image beam. From the imaging data acquired, Edge Spread Functions at a plurality of locations within the test target are calculated. A model of Point Spread Functions is constructed from the Edge Spread Functions. Based on the Point Spread Functions, a plurality of imaging performance values corresponding to the plurality of locations are calculated. The imaging performance values are based on Ensquared Energy, Encircled Energy, or Strehl ratio.