Aehr Test Systems
ELECTRONICS TESTER
Last updated:
Abstract:
A tester apparatus is described. Various components contribute to the functionality of the tester apparatus to facilitate movement of a wafer pack holding a vacuum without human oversight. These functionalities include a latch system to keep the wafer pack intact and a pressure sensing system to detect and relay a pressure in the wafer pack.
Status:
Application
Type:
Utility
Filling date:
5 Oct 2021
Issue date:
7 Apr 2022