Aehr Test Systems
ELECTRONICS TESTER

Last updated:

Abstract:

A tester apparatus is described. Various components contribute to the functionality of the tester apparatus to facilitate movement of a wafer pack holding a vacuum without human oversight. These functionalities include a latch system to keep the wafer pack intact and a pressure sensing system to detect and relay a pressure in the wafer pack.

Status:
Application
Type:

Utility

Filling date:

5 Oct 2021

Issue date:

7 Apr 2022