Align Technology, Inc.
Mounting system that maintains stability of optics as temperature changes

Abstract:

An optical system comprises a detector to determine one or more intensities of light impinging on one or more locations of the detector and an optical element to direct light towards the detector along a detection axis. The detector and optical element are coupled together by three or more substantially flat flexures respectively defining three or more flexure planes parallel to the detection axis. The three or more substantially flat flexures maintain an alignment of the optical element to the detector with changes in temperature.