Applied Materials, Inc.
Precursors for the atomic layer deposition of transition metals and methods of use

Abstract:

Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by: ##STR00001## where A.sub.1, A.sub.2, A.sub.3, and A.sub.4 are atoms in a 6-membered ring and are independently selected from C, N, O, S, and P; and where R.sub.1, R.sub.2, R.sub.3, R.sub.4, R.sub.5, and R.sub.6 are independently selected from the group consisting of H, amino groups, C1-C6 alkyl groups, or C4-10 cycloalkyl groups; and further provided that alkyl groups may optionally contain silicon; and where the metal coordination complex is capable of participating in a Diels-Alder type reaction with a dienophile. Processing methods using the metal coordination complexes are also described.