Applied Materials, Inc.
Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS

Abstract:

A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y.sub.2O.sub.3--ZrO.sub.2 powder consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2, and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y.sub.2O.sub.3--ZrO.sub.2, the sintered ceramic body consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2.