Applied Materials, Inc.
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE

Abstract:

In an embodiment, a mainframe of a device fabrication system comprises a base and a plurality of facets on the base, wherein each facet of the plurality of facets comprises a frame. The mainframe further comprises a plurality of replaceable interface plates, each replaceable interface plate of the plurality of replaceable interface plates attached to a respective facet of the plurality of facets such that at most one replaceable interface plate is attached to each facet, wherein at least one replaceable interface plate of the plurality of replaceable interface plates comprises one or more access ports. The mainframe further comprises a lid over the plurality of facets, wherein the base, the lid and the plurality of facets with the attached plurality of replaceable interface plates together define an interior volume. The mainframe further comprises a robot arm in the interior volume.