Applied Materials, Inc.
METHODS AND APPARATUS FOR ABSOLUTE AND RELATIVE DEPTH MEASUREMENTS USING CAMERA FOCUS DISTANCE

Abstract:

A depth measuring apparatus includes a camera assembly configured to capture a plurality of images of a target at a plurality of distances from the target. The depth measuring apparatus further includes a controller configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine, based on the corresponding maximum gradient value, a depth measurement for a region of the plurality of regions.