Applied Materials, Inc.
PLASMA RESISTANT PROCESS CHAMBER LID

Abstract:

A lid or other chamber component for a process chamber comprises a) at least one surface comprising a first ceramic material, wherein the first ceramic material comprises Y.sub.3Al.sub.5O.sub.12 and b) an internal region beneath the at least one surface comprising a second ceramic material, wherein the second ceramic material comprises a combination of Al.sub.2O.sub.3 and ZrO.sub.2.