Applied Materials, Inc.
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

Abstract:

A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y.sub.3Al.sub.5O.sub.12 having a dielectric constant of 9.76+/-up to 30% and a hermiticity of 4.4E-10 cm.sup.3/s+/-up to 30%.