Applied Materials, Inc.
METHODS FOR INCREASING THE REFRACTIVE INDEX OF HIGH-INDEX NANOIMPRINT LITHOGRAPHY FILMS

Abstract:

Embodiments of the present disclosure generally relate to optically densified nanoimprint films and processes for making these optically densified nanoimprint films, as well as optical devices containing the optically densified nanoimprint films. In one or more embodiments, a method of forming a nanoimprint film includes positioning a substrate containing a porous nanoimprint film within a processing chamber, where the porous nanoimprint film contains nanoparticles and voids between the nanoparticles, and the porous nanoimprint film has a refractive index of less than 2. The method also includes depositing a metal oxide on the porous nanoimprint film and within at least a portion of the voids to produce an optically densified nanoimprint film during an atomic layer deposition (ALD) process.