Applied Materials, Inc.
HOLDING DEVICE FOR HOLDING A CARRIER OR A COMPONENT IN A VACUUM CHAMBER, USE OF A HOLDING DEVICE FOR HOLDING A CARRIER OR A COMPONENT IN A VACUUM CHAMBER, APPARATUS FOR HANDLING A CARRIER IN A VACUUM CHAMBER, AND VACUUM DEPOSITION SYSTEM

Abstract:

A holding device for holding a carrier or a component in a vacuum chamber is described. The holding device includes one or more electric controllable holding elements, a housing for at least partially housing the one or more electric controllable holding elements, the housing having a reception for the one or more electric controllable holding elements, a sealing for providing an air-tight sealing between the housing and the one or more electric controllable holding elements being arranged in the reception; and an air-tight connection for an electric supply line for the one or more electric controllable holding elements. Further, a method of producing a holding device, an apparatus for handling a carrier in a vacuum chamber, and a vacuum deposition system are described.