Applied Materials, Inc.
METHOD OF MANUFACTURING A STAMP FOR IMPRINT LITHOGRAPHY, STAMP FOR IMPRINT LITHOGRAPHY, IMPRINT ROLLER AND ROLL-TO-ROLL SUBSTRATE PROCESSING APPARATUS

Abstract:

A method of manufacturing a stamp for imprint lithography is described. The method includes coating a master with a layer system, comprising a first layer and a second layer, the second layer being on top of the first layer, the master providing a template of an imprint structure. The method further includes providing a stabilization element over the second layer, the stabilization element having a higher bending resistance than the second layer, and separating the master from the layer system to expose the imprint structure.