Applied Materials, Inc.
TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ONTO A SUBSTRATE
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Abstract:
A temperature-controlled shield for an evaporation source is described. The temperature-controlled shield is configured to provide a pre-heating zone or a post-cooling zone.
Status:
Application
Type:
Utility
Filling date:
27 May 2021
Issue date:
9 Dec 2021