Applied Materials, Inc.
Intelligent processing tools
Last updated:
Abstract:
One or more first parameters associated with an electronic device manufacturing process are monitored. An artificial neural network associated with the one or more first parameters is determined. One or more second parameters are determined using the artificial neural network. The one or more first parameters are adjusted using the one or more second parameters.
Status:
Grant
Type:
Utility
Filling date:
11 Nov 2014
Issue date:
28 Dec 2021