Applied Materials, Inc.
3-D DRAM CELL WITH MECHANICAL STABILITY

Abstract:

Described are memory devices having stacked DRAM cells, resulting in an increase in DRAM cell bit-density. The area of a unit cell is composed of a capacitor, a cell transistor, an isolation region and a connection region, where every capacitor and active region for the cell capacitor is electrically isolated. The memory cells have supporting bars. Methods of forming a memory device are described. The methods include patterning the isolation region with supporting bars, removing non-insulator layers after isolation region patterning, and filling the opened region with an insulator.