Applied Materials, Inc.
ROBOT APPARATUS AND SYSTEMS, AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING

Abstract:

Electronic device manufacturing systems, robot apparatus and associated methods are described. The systems, apparatus and methods are configured to efficiently retrieve and place substrates from N substrate supports (where N>2). The robot apparatus includes at least N end effectors plus one end effector (N+1) or plus two end effectors (N+2) enabling the robot to sequentially retrieve and place substrates within one or more process chambers during a single cycle (e.g., without having to return to a load lock or other location to place proceed substrates and retrieve unprocessed substrates).