Applied Materials, Inc.
MEASUREMENT OF THICKNESS OF THERMAL BARRIER COATINGS USING 3D IMAGING AND SURFACE SUBTRACTION METHODS FOR OBJECTS WITH COMPLEX GEOMETRIES

Abstract:

Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.