Applied Materials, Inc.
Diaphragm valves and methods of operating same

Abstract:

A diaphragm valve includes an inlet port, an outlet port, and a valve seat proximate one of the inlet port or the outlet port. A diaphragm is positioned relative to the valve seat and has an open state wherein the diaphragm is spaced from the valve seat to enable a fluid path between the inlet port and the outlet port. The diaphragm has a closed state wherein the diaphragm is seated on the valve seat to block the fluid path. A coupling member is coupled between the diaphragm and a reciprocatable member and configured to maintain the diaphragm in the open state while the reciprocatable member is in the opened position. The coupling member may have a clearance gap relative to the reciprocatable member when the reciprocatable member is in the closed position. Other diaphragm valves and methods of operating diaphragm valves are also disclosed.