Applied Materials, Inc.
Using graphics processing unit for substrate routing and throughput modeling

Abstract:

A method includes receiving a matrix including start times associated with substrate operations in a substrate processing system. The method further includes generating, by a first graphics processing unit (GPU) of one or more GPUs, a plurality of matrices based on the matrix. The method further includes concurrently processing, by a plurality of cores of the one or more GPUs, the plurality of matrices to generate parallel outputs. A schedule for processing substrates in the substrate processing system is to be generated based on the parallel outputs.